Tej zaum koj yuav lossis tsis tau hnov txog cov tshuab nqus tsev semiconductor; cov cuab yeej precision no ua qhov tseeb "tsis pom lub cav" nyob rau hauv cov khoom lag luam semiconductor. Nws cov thev naus laus zis thiab kev ua lag luam muaj zog cuam tshuam ncaj qha rau kev ua haujlwm thiab cov txiaj ntsig ntawm kev tsim khoom thoob ntiaj teb.
Lub tshuab nqus tsev semiconductor yog lub tshuab nqus tsev tshwj xeeb siv hauv kev tsim cov khoom siv hluav taws xob semiconductor thiab lwm yam khoom siv high -tech. Nws siv cov cuab yeej "qhuav"- txhais tau tias tsis muaj roj lubricating lossis lwm cov kua dej siv hauv lub twj tso kua mis- yog li tshem tawm cov teeb meem cuam tshuam txog roj paug thiab xau. Raws li lawv cov qauv kev khiav hauj lwm thiab cov qauv tsim, semiconductor lub tshuab nqus tsev twj tuaj yeem muab faib ua ntau hom, xws li cov twj tso kua mis qhuav, cov twj tso kua mis qhuav, cov twj tso kua mis qhuav, cov twj turbomolecular, thiab cov twj tso kua mis cryogenic.
Semiconductor lub tshuab nqus tsev twj ua lub luag haujlwm tseem ceeb hauv cov txheej txheem tsim khoom semiconductor. Lawv yog cov khoom siv ntau yam khoom siv dav siv thoob plaws ntau theem, suav nrog wafer fabrication, load-lock operations, etching, CVD (Chemical Vapor Deposition), ALD (Atomic Layer Deposition), ntim, thiab kuaj. Cov txheej txheem tshwj xeeb no xav kom huv si ib puag ncig lossis kev ua haujlwm nruj kom ntseeg tau tias qhov ua tau zoo thiab cov txiaj ntsig ntawm cov khoom siv semiconductor tshwm sim. Nyob rau hauv xyoo tas los no, raws li cov txheej txheem qib siab tau thawb mus rau 3-nanometer cim- thiab txawm tias me dua -wafer fabs tau pom qhov nthuav dav hauv cov kev cai hais txog kev huv, kev ceev nrawm, thiab kev ruaj ntseg ntawm lub tshuab nqus tsev. Cov qauv no tau tsav cov thev naus laus zis hloov pauv hauv cov twj siv hluav taws xob semiconductor, ua rau muaj kev hloov pauv los ntawm cov qauv siv roj foob mus rau qib siab, siab magnetically levitated qhuav twj.
Lub tshuab nqus tsev semiconductor muaj cov kabmob ncaj qha ntawm ob qho tib si nti zoo thiab kev ua haujlwm ntau lawm. Txawm li cas los xij, semiconductor lub tshuab nqus tsev twj yog tus cwj pwm los ntawm cov txheej txheem siab rau kev nkag, nrog rau cov kev cai nruj txog cov khoom lag luam, kev muaj peev xwm kho tau, thiab kev siv hluav taws xob:
Kev ntseeg tau: Lub tshuab nqus tsev twj siv nyob rau hauv daim ntawv thov semiconductor xav tau kev saib xyuas tsis tu ncua; yog li ntawd, cov khoom lag luam txhim khu kev qha tuaj yeem txo qhov zaus ntawm kev kho, yog li txo cov nqi ua haujlwm rau cov neeg siv khoom. Feem ntau, tus nqi ntawm ib qho kev kho qhov teeb meem yog kwv yees li ib - tsib feem pua ntawm cov khoom siv tag nrho.
Customization: Kev khiav hauj lwm tej yam kev mob sib txawv heev nyob rau hauv txawv wafer ntau lawm kab; Raws li qhov tshwm sim, cov kev daws teeb meem uas yuav tsum tau ua thiab cov khoom tshwj xeeb yog tus kheej heev, yuav tsum muaj kev pabcuam siab.
Kev Siv Hluav Taws Xob: Hauv qhov chaw tsim khoom siv hluav taws xob semiconductor (FAB), lub tshuab nqus tsev - cov khoom siv cuam tshuam txog kwv yees li 20% ntawm tag nrho cov kev siv hluav taws xob. Txhim kho kev siv hluav taws xob hauv cov tshuab no tuaj yeem ua rau txo qis hauv cov neeg siv khoom lub zog tag nrho. Los ntawm daim ntawv thov kev xav, semiconductor nqus tsev twj yog ib qho tseem ceeb rau txhua theem ntawm kev tsim khoom semiconductor. Cov theem no suav nrog cov khoom siv raw khoom theem-xws li silicon ingot rub, slicing, sib tsoo, oxidation, thiab photomask alignment-nrog rau cov txheej txheem chip fabrication, xws li photomask creation, pellicle daim ntawv thov, wafer loj hlob, ion implantation, thiab tshuaj vapor deposition. Tsis tas li ntawd, lawv yog qhov tseem ceeb rau ntau cov kauj ruam tom ntej, nrog rau cov ntim ntim thiab cov khoom siv zaum kawg. Txhua theem no yuav tsum muaj kev tswj hwm ntawm ib puag ncig kom ntseeg tau tias qhov zoo thiab kev ua tau zoo ntawm cov khoom kawg.
Lub tshuab nqus tsev twj tso kua mis ua lub luag haujlwm tseem ceeb thoob plaws ntau theem ntawm kev tsim khoom semiconductor, nrog rau hom tshwj xeeb ntawm lub tshuab nqus tsev twj ua haujlwm nyob ntawm qhov tshwj xeeb ntawm txhua txoj haujlwm. Lub tshuab nqus tsev qhuav ua rau cov khoom siv semiconductor raug tsim vim lawv tsis yog - kis kab mob thiab kev hloov pauv siab; lub sijhawm no, cov twj turbomolecular, Cov twj tso kua mis hauv paus, thiab cov cuab yeej zoo sib xws ua lub luag haujlwm tseem ceeb hauv cov khoom siv siab heev - nqus tsev lossis nruab nrab - daim ntawv thov nqus tsev. Tsis tas li ntawd, tau tsav los ntawm kev txhim kho thev naus laus zis, kev siv cov tshuab nqus tsev twj tso kua mis hybrid tau dhau los ua kom tau raws li ntau haiv neeg thiab kev xav tau ntawm cov txheej txheem tsim khoom niaj hnub no.
Raws li cov ntaub ntawv los ntawm SEMI, cov khoom siv semiconductor kev ua lag luam tau mus txog cov ntaub ntawv tshiab siab hauv 2022, tsoo lub lag luam loj ntawm $ 107.6 billion- sawv cev rau Compound Annual Growth Rate (CAGR) ntawm 21.63% txij li xyoo 2019. Cov ntaub ntawv los ntawm Huajing Industry Research Institute qhia tias lub ntiaj teb twj tso kua mis 7 billion yuan. 2022, xav txog CAGR ntawm 12.77% txij li xyoo 2019.
Raws li kev suav muab los ntawm cov ntaub ntawv muab los ntawm ntau lub koom haum tshawb fawb, lub ntiaj teb semiconductor lub tshuab nqus tsev twj tso kua mis kev lag luam tau kwv yees kom ncav cuag qhov loj ntawm 19.6 billion RMB hauv 2024 thiab 21.6 billion RMB hauv 2025. Qhov kev loj hlob no yuav tsum tau tsav los ntawm kwv yees li 4.5 billion RMB (hauv 2024 2024 billion RMB) thiab 5. 15.1 billion RMB (hauv 2024) thiab 16.0 billion RMB (hauv 2025) hauv kev thov rau kev hloov khoom siv thiab hloov kho dua tshiab. Tsis tas li ntawd, kev sib koom ua lag luam semiconductor nqus tsev twj tso kua mis lag luam hauv Suav teb Mainland thiab Taiwan tau kwv yees kom ncav cuag 8.6 billion RMB hauv xyoo 2024 thiab 9.8 billion RMB xyoo 2025, suav nrog kwv yees li 2.5 billion RMB (hauv 2024) thiab 3.2 billion RMB (hauv 2025) hauv kev thov tshiab, thiab kwv yees li 2.7 billion RMB (hauv 2025). RMB (hauv 2025) hauv kev thov rau kev hloov khoom siv.
Tam sim no, lub lag luam semiconductor nqus tsev twj tso kua mis yog dominated feem ntau los ntawm European thiab Japanese tuam txhab. Cov thawj coj no suav nrog Atlas Copco (Sweden), Edwards (tau los ntawm Atlas; UK), Ebara (Nyiv), Pfeiffer Vacuum (Lub Tebchaws Yelemees), thiab Kashiyama (Nyiv). Cov neeg tseem ceeb hauv tsev hauv qhov haujlwm no suav nrog Zhongkeyi thiab Hanbell Precise Machinery. Cov tuam txhab lag luam thoob ntiaj teb hauv kev siv tshuab nqus tsev vacuum khav theeb keeb kwm ntev thiab cov thev naus laus zis siab heev; Tsis tas li ntawd, lawv tuav cov kev taw qhia dav dav thoob plaws cov haujlwm muaj feem xyuam thiab txuas ntxiv nthuav lawv txoj kev lag luam los ntawm kev sib koom ua ke thiab kev yuav khoom.
Raws li cov ntaub ntawv muaj, kev sib tw toj roob hauv pes ntawm lub ntiaj teb semiconductor lub tshuab nqus tsev twj tso kua mis ua lag luam hauv 2021 tau nthuav tawm qhov txawv txav mus rau qhov siab. Qhov tshwj xeeb, Atlas tau hais kom muaj kev lag luam loj tshaj plaws - ncav cuag 48%- yog li ua kom pom nws txoj haujlwm tseem ceeb hauv cov haujlwm no. Nws tau ua raws li Pfeiffer, uas tuav 13% kev ua lag luam sib koom, qhia txog nws qhov kev sib tw tseem ceeb hauv kev lag luam. Lwm lub tuam txhab thoob ntiaj teb sib sau ua ke rau 34% ntawm kev ua lag luam, qhia txog lawv qhov tseem ceeb txuas ntxiv hauv kev lag luam thoob ntiaj teb. Nws yog ib qho tsim nyog sau cia tias thaum cov tuam txhab tsim khoom hauv tsev-xws li Hanbell thiab Zhongkeyi- tam sim no tuav ib qho kev lag luam me me (tag nrho tsuas yog 5%), daim duab no qhia txog kev nce zuj zus ntawm cov lag luam hauv tsev nyob rau hauv qhov siab - thev naus laus zis no thaum lawv nce kev sib tw thoob ntiaj teb.
Raws li kev txheeb xyuas los ntawm Hanghangcha Research Center, lub ntiaj teb semiconductor nqus twj tso kua mis kev lag luam yog npaj los tuav nws txoj kev loj hlob zoo nyob rau xyoo tom ntej, nrog rau kev thov thoob plaws txhua ntu uas nthuav tawm txoj kev loj hlob zoo. Tshwj xeeb, kev nthuav dav sai ntawm kev lag luam tawm tshiab-xws li Is Taws Nem ntawm Yam (IoT), huab xam, thiab cov ntaub ntawv loj- ua ke nrog kev thov kom muaj peev xwm nthuav dav uas tau tsav los ntawm cov txheej txheem txheej txheem thev naus laus zis hauv cov khoom siv hluav taws xob sib xyaw ua ke, tau qhib kev lag luam loj heev rau kev lag luam khoom siv semiconductor, yog li kev ua lag luam ib txhij ua lag luam.